Dielectrical Characteristics of Ultrathin Reoxidized Nitrided Oxides by Rapid Thermal Process
Vol. 16, No. 11, pp. 1179-1185, Nov. 1991
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Cite this article
[IEEE Style]
이용재 and 안점영, "Dielectrical Characteristics of Ultrathin Reoxidized Nitrided Oxides by Rapid Thermal Process," The Journal of Korean Institute of Communications and Information Sciences, vol. 16, no. 11, pp. 1179-1185, 1991. DOI: .
[ACM Style]
이용재 and 안점영. 1991. Dielectrical Characteristics of Ultrathin Reoxidized Nitrided Oxides by Rapid Thermal Process. The Journal of Korean Institute of Communications and Information Sciences, 16, 11, (1991), 1179-1185. DOI: .
[KICS Style]
이용재 and 안점영, "Dielectrical Characteristics of Ultrathin Reoxidized Nitrided Oxides by Rapid Thermal Process," The Journal of Korean Institute of Communications and Information Sciences, vol. 16, no. 11, pp. 1179-1185, 11. 1991.
pISSN : 1226 - 4717
eISSN : 2287 - 3880