Calibration of a Thin Film Micromirror Array Inspection System
Vol. 24, No. 5, pp. 968-976, May 1999
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Cite this article
[IEEE Style]
이은숙 and 이병욱, "Calibration of a Thin Film Micromirror Array Inspection System," The Journal of Korean Institute of Communications and Information Sciences, vol. 24, no. 5, pp. 968-976, 1999. DOI: .
[ACM Style]
이은숙 and 이병욱. 1999. Calibration of a Thin Film Micromirror Array Inspection System. The Journal of Korean Institute of Communications and Information Sciences, 24, 5, (1999), 968-976. DOI: .
[KICS Style]
이은숙 and 이병욱, "Calibration of a Thin Film Micromirror Array Inspection System," The Journal of Korean Institute of Communications and Information Sciences, vol. 24, no. 5, pp. 968-976, 5. 1999.