Process Control of Titanium Silicide Formation Using RTP
Vol. 15, No. 5, pp. 399-405, May 1990
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Cite this article
[IEEE Style]
이용재, "Process Control of Titanium Silicide Formation Using RTP," The Journal of Korean Institute of Communications and Information Sciences, vol. 15, no. 5, pp. 399-405, 1990. DOI: .
[ACM Style]
이용재. 1990. Process Control of Titanium Silicide Formation Using RTP. The Journal of Korean Institute of Communications and Information Sciences, 15, 5, (1990), 399-405. DOI: .
[KICS Style]
이용재, "Process Control of Titanium Silicide Formation Using RTP," The Journal of Korean Institute of Communications and Information Sciences, vol. 15, no. 5, pp. 399-405, 5. 1990.
pISSN : 1226 - 4717
eISSN : 2287 - 3880