A Study on the Thin-Film Bulk Acoustic Resonator Size Effects on Ladder Filter Performance 


Vol. 27,  No. 10, pp. 951-958, Oct.  2002


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  Abstract

TFBAR filters for wireless applications are simulated and fabricated in this work. A CAD model is developed for the air-gap type resonator and the modified Butterworth-Van Dyke model (MBVD) is used in filter design. The aluminum nitride is chosen in this paper as the piezoelectric material with top and bottom platinum electrodes. To verify the developed CAD model, simulated and measured results are compared for various top electrode thicknesses, and it is confirmed that the agreement is within 0.5 % for the parallel resonance frequency. Four types of the ladder type bandpass filters are designed and their responses are compared with measured data. The effects of different series and shunt TFBARs area sizes are also predicted and it is revealed that the size of the resonators significantly affects sideband rejection performance without changing the number of ladder filter stages. It is observed that 6 dB out-of-band rejection improvement for 3/2 stage filters is obtained with double-sized shunt TFBARs, while 11 dB improvement is achieved with triple-sized shunt TFBARs.

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  Cite this article

[IEEE Style]

K. Kim, J. Yook, H. Park, "A Study on the Thin-Film Bulk Acoustic Resonator Size Effects on Ladder Filter Performance," The Journal of Korean Institute of Communications and Information Sciences, vol. 27, no. 10, pp. 951-958, 2002. DOI: .

[ACM Style]

Kun-Wook Kim, Jong-Gwan Yook, and Han-Kyu Park. 2002. A Study on the Thin-Film Bulk Acoustic Resonator Size Effects on Ladder Filter Performance. The Journal of Korean Institute of Communications and Information Sciences, 27, 10, (2002), 951-958. DOI: .

[KICS Style]

Kun-Wook Kim, Jong-Gwan Yook, Han-Kyu Park, "A Study on the Thin-Film Bulk Acoustic Resonator Size Effects on Ladder Filter Performance," The Journal of Korean Institute of Communications and Information Sciences, vol. 27, no. 10, pp. 951-958, 10. 2002.

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pISSN : 1226 - 4717
eISSN : 2287 - 3880